JPH0471161B2 - - Google Patents

Info

Publication number
JPH0471161B2
JPH0471161B2 JP63169010A JP16901088A JPH0471161B2 JP H0471161 B2 JPH0471161 B2 JP H0471161B2 JP 63169010 A JP63169010 A JP 63169010A JP 16901088 A JP16901088 A JP 16901088A JP H0471161 B2 JPH0471161 B2 JP H0471161B2
Authority
JP
Japan
Prior art keywords
pitch
diffracted light
width
light
average
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63169010A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6426102A (en
Inventor
Hidekazu Sekizawa
Akito Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16901088A priority Critical patent/JPS6426102A/ja
Publication of JPS6426102A publication Critical patent/JPS6426102A/ja
Publication of JPH0471161B2 publication Critical patent/JPH0471161B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP16901088A 1988-07-08 1988-07-08 Shape measuring instrument Granted JPS6426102A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16901088A JPS6426102A (en) 1988-07-08 1988-07-08 Shape measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16901088A JPS6426102A (en) 1988-07-08 1988-07-08 Shape measuring instrument

Publications (2)

Publication Number Publication Date
JPS6426102A JPS6426102A (en) 1989-01-27
JPH0471161B2 true JPH0471161B2 (en]) 1992-11-13

Family

ID=15878662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16901088A Granted JPS6426102A (en) 1988-07-08 1988-07-08 Shape measuring instrument

Country Status (1)

Country Link
JP (1) JPS6426102A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE516501C2 (sv) * 2000-05-18 2002-01-22 Sandvik Ab Verktygskoppling
JP4586260B2 (ja) * 2000-11-14 2010-11-24 富士電機デバイステクノロジー株式会社 ディスクリート・トラック方式の磁気記憶媒体の表面欠陥検査方法
EP1965383A1 (en) * 2007-03-02 2008-09-03 Singulus Mastering B.V. Diffraction order measurement

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4200396A (en) * 1977-12-19 1980-04-29 Rca Corporation Optically testing the lateral dimensions of a pattern

Also Published As

Publication number Publication date
JPS6426102A (en) 1989-01-27

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